Our silicon parts and boats are widely used in semiconductor wafer processing. The boats are mainly used in oxidation, annealing, CVD and other processes; Focus ring and Showerhead mainly used in plasma etcher, has won the recognition from semiconductor manufacturers worldwide.
We have many high precision inspection equipment—such as:CMM, projector, roughness tester, resistivity tester, LPC and other equipment. We own more than 50 high-precision machine centers such as: CNC machining center, CNC lathe, surface grinder, wiresaw, bandsaw, slotting machine, centerless grinding machine,etc. High purity cleaning lines for semiconductor parts are available at Ferrotec which is qualified even for 7nm process.